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Analyzing the Contamination in Electronic Packages: Internal Vapor Analysis

Internal Vapor Analysis is a complete quantitative analysis of the ambient gases contained within the hermetic cavity of microelectronic devices. The ORS IVA® test is performed in accordance with ORS SOP MEL-1053 (an enhanced method from Mil-Std-883, Method 1018, Procedure 1, « Internal Gas Analysis »), for hermetic cavity from 0.0006cc and up.

Interpretation of RGA Data

Residual Gas Analysis of hermetic microelectronic devices has traditionally been treated as a means for measuring a device’s internal moisture content only. Too many times, the moisture reading is treated on a pass/fail basis using Mil-Std criteria that all devices must contain less than 5,000 parts per million by volume (ppmv) of moisture. In reality, the other gases routinely reported with the moisture contain a wealth of information.

IVA® Test Sequence

The test sequence begins by loading a single sample on test instrument where the lid of the sample is sealed against a Viton O-ring. It is through the center of this O-ring that the puncture pin will be driven to pierce the package lid. This mounting procedure places most of the sample outside the realm of the mass spectrometer analyzer.

Outgassing Characterization with Glass Ampoules IVA® Test Sequence

The Material Outgassing Characterization test developed at ORS is a qualitative and quantitative analysis of the gaseous substances desorbed from a material after thermal stress. The analysis measures the relative volumetric concentrations of volatile organics and other substances at the vapor state.

Why Be Concerned About Moisture in Hermetic Packages?

Moisture-related failure of microelectronic components have been prevalent throughout the Microelectronics Industry for many years. In the mid-1950s, Crawford and Weigand showed that water vapor was the greatest contamination problem.

Reference Documents and Forms

Instructions for the Use of Gas Collection Cylinders

Instructions for the use of ORS gas collection cylinders (dry box atmosphere sampling, gas line purity checking, etc.).

IVA® Submission Form

Form to be used when submitting samples for gas analysis or hermeticity testing.


Formulas used for the Conversion of Moisture Values

These formulas come from General Eastern documentation. The leak testing of sealed packages, when the initial atmosphere in the enclosure had some helium, became a common practice by the early nineteen sixties. In 1965 D.A. Howl and C.A. Mann reported on a leak testing method for enclosures which were not sealed in an atmosphere containing helium. This new method forced helium under pressure through the leakage path into the enclosure. A helium mass spectrometer then detected the helium escaping the enclosure. Subsequently, MIL-STD 883 adopted a leak test method based on this work. Bibliographies at the end of chapters will lead the reader to areas beyond the present scope of this monograph.

Gas Evolution in Leaking Package – User Guide

User Guide describing how to set parameters on the web tool, and explanation of the displayed information.

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